Analytical Sciences

Using Laser Interference Lithography in the Fabrication of a Simplified Micro- and Nanofluidic Device for Label-free Detection

Taiga AJIRI,*1 Haruya KASA,*2 Masatoshi MAEKI,*3 Akihiko ISHIDA,*3 Hirofumi TANI,*3 Junji NISHII,*2 and Manabu TOKESHI*3,*4,*5,*6

*1 Graduate School of Chemical Sciences and Engineering, Hokkaido University, Kita 13 Nishi 8, Kita, Sapporo 060-8628, Japan
*2 Research Institute for Electronic Science, Hokkaido University, Kita 20 Nishi 10, Kita, Sapporo 001-0020, Japan
*3 Division of Applied Chemistry, Faculty of Engineering, Hokkaido University, Kita 13 Nishi 8, Kita, Sapporo 060-8628, Japan
*4 ImPACT Research Center for Advanced Nanobiodevices, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
*5 Innovative Research Center for Preventive Medical Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8601, Japan
*6 Institute of Innovative for Future Society, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8601, Japan

Recently, we developed a label-free detection method based on optical diffraction, and implemented it in on our fabricated micro- and nanofluidic device. This detection method is simple and useful for detecting biomolecules, but the device fabrication consists of complicated processes. In this paper, we propose a simple method for fabricating the micro- and nanofluidic device; the fabrication combines laser interference lithography with conventional photolithography. The performance of a device fabricated by the proposed method is comparable to the performance of the device in our previous study.

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