Analytical Sciences

Spectroscopic Characteristics of Spiral Flow ICP for Axially Viewing ICP Optical Emission Spectrometry

Masaki OHATA,*1 Satoru KUROSAWA,*2 Isao SHINODUKA,*2 Yuichi TAKAKU,*3 and Yoko KISHI*4

*1 National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan
*2 NTT Advanced Technology Corp., 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0124, Japan
*3 Institute for Environmental Sciences, 1-7 Ienomae, Obuchi, Rokkasho, Kamikita, Aomori 039-3212, Japan
*4 IAS Inc., 4-39-5-916 Fujimidai, Kunitachi, Tokyo 186-0003, Japan

Spectroscopic characteristics of a spiral flow inductively coupled plasma (ICP), which could be sustained stably at 9 L min⁻¹ of Ar plasma gas flow rate with 1.5 kW RF forward power, were studied for axially viewing ICPOES. The emission intensity profile, excitation temperature and plasma robustness were evaluated, and were similar to those of the standard ICP. The background and emission intensities of elements as well as the excitation behavior for both atom and ion lines were also examined and compared to those of the standard ICP. Since the spectroscopic characteristics of the spiral flow ICP were similar to those of the standard ICP, it could be used as a new low gas flow ICP in axially viewing ICPOES.

J-STAGE: View this article in J-STAGE