Abstract − Analytical Sciences, 25(3), 323 (2009).
Depth Profiling of Metallic Coatings Evaluated from Spatially-resolved Measurement in Glow Discharge Optical Emission Spectrometr
Yoshitaka ZENITANI, Fuyuki SAKAMOTO, and Kazuaki WAGATSUMA
Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Sendai 980-8577, Japan
A two-dimensionally imaging spectrometer system was employed to measure spatial emission images of a glow discharge plasma in atomic emission spectrometry. The emission intensities were not uniform in the radial direction of the plasma region, but yielded a characteristic distribution from the central portion towards the surrounding zone in the plasma. Temporal variations in the emission images were observed when a zinc-coated steel plate and a thermally-deposited copper film were employed as the sample. Depth profiles of these surface layers, estimated from the emission images, were compared among different integration areas of the emission intensities.
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