Abstract − Analytical Sciences, 18(4), 477 (2002).
Origin of Trace Organic ContaminantsAdsorbed on the Surface of Silicon Wafers in a ManufacturingLine
Hyun-Mee PARK,* Young-ManKIM,* Chan Seong CHEONG,* Jae-Chun RYU,* Dai WoonLEE,** and Kang-Bong LEE*
*Advanced Analysis Center, KoreaInstitute of Science and Technology, P. O. Box 131, Cheongryangri, Seoul130-650, Korea
**Department of Chemistry, Yonsei University, SeodaimunkuSincheondong 134, Seoul 120-749, Korea
**Department of Chemistry, Yonsei University, SeodaimunkuSincheondong 134, Seoul 120-749, Korea
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