Analytical Sciences

Grazing-Exit X-Ray Spectrometry for Surface and Thin-Film Analyses

Kouichi TSUJI, Zoya SPOLNIK, Kazuaki WAGATSUMA, Shinji NAGATA, and Isamu SATOH

Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba, Sendai 980-8577, Japan

Electron-probe x-ray micro analysis (EPMA) and particle-induced x-ray emission analysis (PIXE) were performed under grazing-exit conditions. To control the exit angle (take-off angle), a new sample holder having a stepping motor was developed for grazing-exit EPMA. A carefully polished surface of a stainless-steel sample was measured. The surface of stainless steel is normally covered with a thin native oxide layer. The intensity ratio of Cr K_alpha to Fe K_alpha increases significantly at the grazing angle, becoming about 5-times larger at 0.2° than at 40°. This result indicates that grazing-exit EPMA is useful for surface analysis. In addition, a new PIXE equipment was developed for grazing-exit x-ray measurements. The sample is fixed and the x-ray detector is moved by applying a linear stage. Preliminary experimental results of grazing-exit PIXE are also shown.

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