Abstract − Analytical Sciences, 15(4), 319 (1999).
Advanced Helium Glow-Discharge Emission Source by Conducting d.c. Self-Bias Current in the 13.56 MHz Radio Frequency Plasma
Hideyuki MATSUTA and Kazuaki WAGATSUMA
Institute for Materials Research, Tohoku University, Katahira, Sendai 980-8577, Japan
Keywords: Glow discharge, helium, atomic emission spectrometry, radio frequency
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