Analytical Sciences

Probing Depth Study of Conversion Electron/He IonYield XAFS Spectroscopy on Strontium Titanate Thin Films

Etsuya YANASE*1 , Iwao WATANABE*2 , Makoto HARADA*2 , Masao TAKAHASHI*3 , Yoshinori DAKE*4 and Yasushi HIROSHIMA*4

*1 The New Industry Research Organization, 1-5-2Minatojima-minamimachi, Chuo, Kobe 650-0047, Japan
*2 Department of Chemistry, Graduate School of Science, OsakaUniversity, Toyonaka, Osaka 560-0043, Japan
*3 Institute of Scientific and Industrial Research, OsakaUniversity, Ibaraki, Osaka 567-0047, Japan
*4 Kanto Technical Institute, Kawasaki Heavy Industries, Ltd., 118Futatsuzuka, Noda, Chiba 278-8585, Japan

The probing depth of conversion electron/He ionyield XAFS methods has been studied in order to apply these methods toestimate the local distortion of strontium titanate thin films on thicksubstrates. Several strontium titanate thin film samples with differentthicknesses were prepared and the edge-jump amplitudes at both the Sr andTi K-edges were obtained. The probing depths were estimated to be 300 nmfor the Sr K-edge and 30 nm for the Ti K-edge by the conventionalexponential fit. The XAFS spectra and the probing depths measured byconversion electron and He ion yield methods is much the same, though thebackground curves are different. (Keywords: X-Ray absorption fine structure, conversion electron yield,probing depth, strontium titanate, thin film)

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