Analytical Sciences

Quantification Method Using the Inverse Velocity Dependence of Ion Intensities in Secondary Ion Mass Spectrometry: the High-Energy Method

Yasuhiro HIGASHI and Yoshikazu HOMMA

NTT Science and Core Technology Laboratory Group, Midori-cho, Musashino, Tokyo 180, Japan

A quantification method in secondary ion mass spectrometry called the "high-energy method" is proposed: it uses the exponential dependence of secondary ion intensities on the reciprocal of ion velocity. This method was derived from the same velocity dependence of secondary-ion emission as the infinite velocity method proposed by van der Heide, but does not require either the entire energy spectrum of each secondary ion or the special inverse velocity plot. The high-energy method is suitable for simple evaluation of concentrations ranging from several parts per million to tenths of percents. (Keywords: Secondary ion mass spectrometry, quantification method, dopant, velocity, kinetic energy)

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